Term · Photonics, MEMS & Sensors
Lattice mismatch
The difference in crystal lattice constant between an epitaxial layer and its substrate, which forces the growing film into strain and, past a critical thickness, into defect formation.
- Also known as
- Lattice constant mismatch
- Type
- Term
- Domain
- Photonics, MEMS & Sensors, Epitaxy and substrates
Notes
The 4 percent mismatch of GaN on silicon and 8 percent of GaAs on silicon define the central difficulty of heteroepitaxy.
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