Term · Photonics, MEMS & Sensors
Threading dislocation
A line defect that propagates from a mismatched interface up through the epitaxial layers to the device region, acting as a leakage path and non-radiative recombination centre.
- Also known as
- TDD (threading dislocation density)
- Type
- Term
- Domain
- Photonics, MEMS & Sensors, Epitaxy and substrates
Notes
Dislocation density, quoted per square centimetre, is the headline quality figure for any heteroepitaxial wafer.
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