Metric · Photonics, MEMS & Sensors
Critical thickness
The maximum thickness a strained epitaxial layer can reach before it relieves stress by creating misfit dislocations rather than staying elastically strained.
- Also known as
- Matthews-Blakeslee critical thickness
- Type
- Metric
- Domain
- Photonics, MEMS & Sensors, Epitaxy and substrates
Notes
Pseudomorphic device layers are deliberately designed to stay below it, which is what the p in pHEMT signifies.
Related terms
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