Process · Photonics, MEMS & Sensors
Laser lift-off
A separation technique that fires a UV laser through a transparent substrate to decompose a thin interface layer, releasing the epitaxial film for transfer to another carrier.
- Also known as
- LLO
- Type
- Process
- Domain
- Photonics, MEMS & Sensors, Epitaxy and substrates
Notes
Standard for removing sapphire from GaN LED epitaxy to make thin-film flip-chip and micro-LED devices.
Related terms
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