Metric · Photonics, MEMS & Sensors
Brownian noise
The fundamental noise floor of a mechanical sensor, caused by random thermal collisions of gas molecules with the proof mass. It is set by temperature, mass and damping, not by electronics.
- Also known as
- Thermomechanical noise, TNEA
- Type
- Metric
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
The reason high-grade inertial MEMS are sealed under vacuum with a getter to raise Q and suppress damping.
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