Component · Photonics, MEMS & Sensors
Proof mass
The suspended inertial mass in an accelerometer or gyroscope whose displacement under acceleration or Coriolis force is what the sensor actually measures.
- Also known as
- Seismic mass, Inertial mass
- Type
- Component
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
Larger proof mass lowers thermal noise but costs die area, the central trade in high-performance inertial MEMS.
Related terms
Part of the Photonics, MEMS & Sensors glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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