Material · Photonics, MEMS & Sensors
Getter
A reactive thin film deposited inside a sealed MEMS or infrared package that chemically absorbs residual and outgassed gases, maintaining vacuum or a controlled ambient over the product's life.
It is activated thermally after sealing.
- Also known as
- Getter film, NEG
- Type
- Material
- Domain
- Photonics, MEMS & Sensors, Packaging and assembly
Notes
Without a getter, slow outgassing from package materials would degrade vacuum and change a resonator's damping over years.
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Part of the Photonics, MEMS & Sensors glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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