Chip lifecycle / Fab build lifecycle / Cleanroom & Facility Systems

Cleanroom & Facility Systems

Fitting out the cleanroom under clean build protocol and installing and commissioning the facility systems: air handling and filtration, ultrapure water, bulk and specialty gases, chemical distribution, process cooling, vacuum, exhaust, abatement and waste treatment, electrical power and backup, until the cleanroom is certified to its cleanliness class.

Where this stage sits

This stage with its neighbours. Each row is a discipline active here, shaded by how mature its work is by the end of each stage.

Stage

^D05 Construction

^A06 Cleanroom & Facility SystemsYou are here

^A07 Tool Procurement & Move-in

Business, site and programme milestones

FIDFinal investment decision TSRTool set release

Facility and manufacturing milestones

DFDesign freeze BEBuilding enclosed CCFacility commissioned and cleanroom certified FTMFirst tool move-in

Investment and business case^A

Built

Commissioned

Technology and capacity planning^O

Built

Commissioned

Site, permits and incentives^D

Built

Commissioned

Programme and project controls^D

Built^D

Commissioned

Facility design and construction^A

Built

Commissioned

Cleanroom and facility systems^A

Built

Commissioned^A

Environment, health, safety and sustainability^A

Built

Commissioned

Equipment and materials procurement^A

Built

Commissioned

Tool installation and qualification^A

Commissioned

Factory automation, MES and OT security^A

Built

Commissioned

Process transfer and integration^A

Built

Commissioned

Yield, quality and reliability^A

Commissioned

Workforce and skills^O

Built

Commissioned

KeyPlannedProject plannedDesignedFacility designedBuiltBuilding enclosedCommissionedCommissioned and certifiedTool setTool set qualifiedProcessProcess qualifiedFaded block: Held, the status shown before it still standsFreeze or sign-off pointMilestone for one item; the rest of the work carries onMilestone gateYou are here: Cleanroom & Facility SystemsAI impactDisruption (red)Augmentation (blue)Opportunity (green)How AI is changing the workWhat the steps mean What the codes mean

Show this chart as a list

Stages

Construction^D
Cleanroom & Facility Systems (this stage)^A
Tool Procurement & Move-in^A

Business, site and programme milestones

Facility and manufacturing milestones

Disciplines

Investment and business case^A
- Construction: maturity Built, Building enclosed. Capital spend tracked against the budget and financing drawn down as the building is enclosed.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Capital spend and financing drawdowns tracked through commissioning and the tool purchase.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Capital spend and financing drawdowns tracked through commissioning and the tool purchase.
Technology and capacity planning^O
- Construction: maturity Built, Building enclosed. Tool list and counts kept current with demand while the building goes up.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Tool list final at the tool set release, matched to the commissioned cleanroom.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Tool list final at the tool set release, matched to the commissioned cleanroom.
Site, permits and incentives^D
- Construction: maturity Built, Building enclosed. Construction permit conditions met and incentive milestones claimed as the building is enclosed.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Operating permit applications and incentive milestone claims made as facility systems are commissioned.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Operating permit applications and incentive milestone claims made as facility systems are commissioned.
Programme and project controls^D
- Construction: maturity Built, Building enclosed. Construction progress controlled against the master schedule until the building is enclosed.^D
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Commissioning and move-in controlled, with the integrated move-in schedule final.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Commissioning and move-in controlled, with the integrated move-in schedule final.
Facility design and construction^A
- Construction: maturity Built, Building enclosed. Structure and envelope built and inspected to the detailed design.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Cleanroom fitted out under clean build protocol, with the construction quality records final.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Cleanroom fitted out under clean build protocol, with the construction quality records final.
Cleanroom and facility systems^A
- Construction: maturity Built, Building enclosed. Facility systems being installed in the enclosed building.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Facility systems commissioned and the cleanroom certified to its class, with tool hook-up points ready.^A
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Facility systems commissioned and the cleanroom certified to its class, with tool hook-up points ready.
Environment, health, safety and sustainability^A
- Construction: maturity Built, Building enclosed. Construction safety managed and hazardous materials readiness prepared.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Hazardous materials readiness reviewed at commissioning, and tool safety reviews under way for the move-in.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Hazardous materials readiness reviewed at commissioning, and tool safety reviews under way for the move-in.
Equipment and materials procurement^A
- Construction: maturity Built, Building enclosed. Tools and materials sourced, with supplier risks assessed.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Tool purchase orders released, and deliveries and logistics planned for the move-in.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Tool purchase orders released, and deliveries and logistics planned for the move-in.^A
Tool installation and qualification^A
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Installation specifications final and the first tools moved in on the integrated move-in schedule.
Factory automation, MES and OT security^A
- Construction: maturity Built, Building enclosed. MES and automation built while the building goes up.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. OT security architecture final and the MES ready for tool connection at the move-in.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. OT security architecture final and the MES ready for tool connection at the move-in.
Process transfer and integration^A
- Construction: maturity Built, Building enclosed. Transfer strategy and plan prepared with the source fab while the building goes up.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Process transfer plan final at the tool set release, and tool matching started at the move-in.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Process transfer plan final at the tool set release, and tool matching started at the move-in.
Yield, quality and reliability^A
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Quality management system plan drafted from the process transfer plan.
Workforce and skills^O
- Construction: maturity Built, Building enclosed. Hiring under way to the workforce plan while the building goes up.
- Cleanroom & Facility Systems: maturity Commissioned, Commissioned and certified. Workforce plan final and the training plan started at the tool move-in.
- Tool Procurement & Move-in: maturity Commissioned, Commissioned and certified. Workforce plan final and the training plan started at the tool move-in.

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