1. Purpose and scope
The cleanroom and its facility systems are the environment every wafer is made in. Particles, molecular contamination, impure water or gases, unstable temperature or vibration show up later as yield loss, so these systems are designed, built and tested with the same care as a process tool. This stage fits out the cleanroom, installs and commissions every facility system and certifies the cleanroom to its class before tools arrive.
Commissioning follows a structured sequence for each system: installation checks, start-up, functional tests and integrated system tests, then handover. Cleanroom certification measures airborne particles, airflow, pressure, temperature and humidity against the class in the basis of design, using the methods of ISO 14644. Hazardous materials systems, toxic gas detection, emergency shut-off and fire protection are tested and reviewed before any hazardous gas or chemical enters the building.
In scope: fit-out, utility installation, commissioning, the facility monitoring and building management systems, utility purity tests, cleanroom certification and the hazardous materials readiness review. Out of scope: hook-up of individual tools, which belongs to the tool stages, though the hook-up points and readiness are prepared here.
13 more sections for registered members.