Technology · Fab Ops, Yield & Metrology
Voltage contrast
An e-beam imaging effect in which a structure's brightness depends on its electrical connectivity and charging, revealing opens, shorts and high-resistance contacts that are invisible to optical inspection.
- Also known as
- VC, Passive voltage contrast, PVC
- Type
- Technology
- Domain
- Fab Ops, Yield & Metrology, Inspection
Notes
Passive voltage contrast on contact and via layers is one of the highest-value early yield learning techniques.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 2 pages of the Hub. In each group, the pages that mention it most come first.
Suggest an improvement
Suggest an improvement to this entry
A clearer definition, an example, a correction or a source an editor can check. Editors review every suggestion before the entry changes.
Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary