Technology · Fab Ops, Yield & Metrology
Virtual metrology
Prediction of a wafer's process result from tool sensor data and context rather than by physically measuring it, allowing every wafer to be estimated while only a sample is actually measured.
- Also known as
- VM, Predictive metrology
- Type
- Technology
- Domain
- Fab Ops, Yield & Metrology, Process control
Notes
Its value is in cycle time and metrology capacity saved, provided the model is regularly re-trained against real measurements.
Related terms
- FDC
- APC
- Run-to-run control
- Metrology sampling
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 6 pages of the Hub. In each group, the pages that mention it most come first.
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Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary