Metric · Fab Ops, Yield & Metrology
Tool uptime
The fraction of calendar or scheduled time a piece of equipment is available to process wafers, after subtracting unscheduled breakdowns, preventive maintenance and qualification.
It is a headline component of OEE.
- Also known as
- Availability
- Type
- Metric
- Domain
- Fab Ops, Yield & Metrology, Fab operations
Notes
SEMI E10 defines the standard equipment state model that makes uptime numbers comparable between vendors.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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