Component · Photonics, MEMS & Sensors
Comb drive
An electrostatic MEMS actuator built from two interdigitated finger arrays, where applied voltage produces a force nearly independent of displacement, giving long, linear travel.
- Also known as
- Interdigitated comb actuator
- Type
- Component
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
The standard drive for resonant gyroscopes and scanning micromirrors because force does not collapse like a parallel plate.
Related terms
Part of the Photonics, MEMS & Sensors glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
No other page of the Hub uses this term yet.
Suggest an improvement
Suggest an improvement to this entry
A clearer definition, an example, a correction or a source an editor can check. Editors review every suggestion before the entry changes.
Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary