Term · Fab Ops, Yield & Metrology
Offline metrology
Measurement performed away from the production flow, often destructive or slow, such as cross-section TEM, SIMS profiling or full physical failure analysis. Used for calibration and root cause, not for control.
- Also known as
- Off-line metrology, Lab metrology
- Type
- Term
- Domain
- Fab Ops, Yield & Metrology, Metrology
Notes
Offline results are the reference that inline techniques such as OCD are calibrated against.
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