Term · Fab Ops, Yield & Metrology
Inline metrology
Measurement performed on production wafers within the process flow, usually non-destructively and on a sampled basis, so results feed control loops while the lot continues through the line.
- Also known as
- In-line metrology
- Type
- Term
- Domain
- Fab Ops, Yield & Metrology, Metrology
Notes
Every inline measurement step costs cycle time and tool capacity, so sampling plans are constantly re-optimised.
Related terms
- Offline metrology
- Metrology sampling
- APC
- Virtual metrology
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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