Component · Lithography & Materials
Cut mask
An additional mask used to sever continuous lines produced by self-aligned patterning into the individual segments the design requires, or to block unwanted features.
Its placement accuracy dominates edge placement error.
- Also known as
- Block mask, Trim mask
- Type
- Component
- Domain
- Lithography & Materials, Patterning techniques
Notes
Cut masks were early candidates for EUV insertion because they are overlay-critical but low in shape count.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
No other page of the Hub uses this term yet.
Suggest an improvement
Suggest an improvement to this entry
A clearer definition, an example, a correction or a source an editor can check. Editors review every suggestion before the entry changes.
Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary