Acronym · Lithography & Materials
EPE (Edge Placement Error)
The total deviation of a printed feature edge from its intended position, combining critical dimension error, overlay and local pattern roughness across all the masks that define a structure.
It is the unified metric for multi-mask patterning.
- Type
- Acronym
- Domain
- Lithography & Materials, Lithography physics
Notes
EPE became the headline patterning budget once cuts, blocks and vias were printed on separate masks.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 2 pages of the Hub. In each group, the pages that mention it most come first.
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