Component · Photonics, MEMS & Sensors
MEMS mirror
A micromachined mirror suspended on torsional hinges and tilted electrostatically, electromagnetically or piezoelectrically to steer a light beam. Resonant operation gives large fast scan angles; quasi-static operation gives arbitrary pointing.
- Also known as
- Scanning micromirror, MEMS scanner
- Type
- Component
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
Central to laser beam scanning projectors, augmented reality glasses and scanning LiDAR.
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