Metric · Fab Ops, Yield & Metrology
Cleanroom class
A rating of airborne particle cleanliness for a fab bay, defined by the maximum number of particles above a given size per cubic metre or cubic foot of air. Lower class numbers mean cleaner air and higher construction and running cost.
- Also known as
- Cleanliness class
- Type
- Metric
- Domain
- Fab Ops, Yield & Metrology, Cleanroom and facilities
Notes
The old US FED-STD-209E classes (Class 1, Class 10) are still spoken in fabs even though ISO 14644 formally replaced them in 2001.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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