Acronym · Fab Ops, Yield & Metrology
HEPA (High Efficiency Particulate Air)
The filter class used in cleanroom ceilings to remove at least 99.97 percent of 0.3 micrometre particles from recirculated air, producing the vertical laminar downflow that keeps particles off wafers.
- Also known as
- ULPA (higher grade)
- Type
- Acronym
- Domain
- Fab Ops, Yield & Metrology, Cleanroom and facilities
Notes
Fan filter units running continuously are one of the largest non-process electricity loads in a fab.
Related terms
- Cleanroom class
- ISO 14644
- Particle count
- Fab facility
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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