Metric · Fab Ops, Yield & Metrology
Particle count
The measured concentration of airborne or on-wafer particles above a threshold size, used both to qualify cleanroom air and to monitor tools. On-wafer particle adders per pass are a standard tool health criterion.
- Also known as
- Particle adders, PWP
- Type
- Metric
- Domain
- Fab Ops, Yield & Metrology, Cleanroom and facilities
Notes
Particles per wafer pass (PWP) on an unpatterned monitor wafer is the usual acceptance test after tool maintenance.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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