Laser Engineer (Lithography Light Source)

Project

Work done for a product or program.

• Design and optimise excimer laser chambers, discharge circuits, pulse power modules and gas mixtures for ArF (193 nm) and KrF (248 nm) operation.
• Control wavelength, bandwidth (E95), pulse energy stability and dose repeatability to the tolerances required by immersion scanners.
• Develop and tune master-oscillator power-amplifier architectures and line-narrowing modules with gratings and prisms.
• Engineer high-power CO2 amplifier chains, beam transport and beam delivery for EUV drive-laser applications.
• Characterise optics lifetime under DUV fluence — window clouding, coating damage, colour-centre formation — and qualify replacements.
• Run laser module reliability testing to extend chamber, pulse-power and optics service intervals in billions of pulses.
• Diagnose field laser issues using pulse energy logs, spectrometry, beam profiling and discharge waveform analysis.
• Manage fluorine, halogen and high-voltage safety systems, interlocks and gas handling in test cells and installed products.
• Support laser-to-scanner integration, including trigger timing, dose control loops and bandwidth-driven imaging effects.
• Drive cost reduction and recycling programmes for laser chambers and optics modules across the installed base.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Maintain design guidelines, coding standards and reusable blocks.General
• Improve design flows and checks with the CAD and methodology teams.General
• Mentor newer engineers and share lessons learned across projects.General

Project

1. Produce and hand over the role's key deliverables
   • Laser module design and qualification reports
   • Bandwidth, wavelength and dose-stability characterisation data
   • Optics and chamber lifetime specification
   • Pulse power and discharge circuit design documentation
   • Field failure analysis and reliability improvement plan
   • Laser-scanner integration specification
2. Design the blockGeneral
   • Write or capture the design to the specification
   • Run lint, simulation or circuit checks
   • Close design reviews and their actions
3. Support integration and sign-offGeneral
   • Fix bugs found by verification
   • Support timing and physical closure
   • Deliver handoff files and documentation

Function

1. Keep design methods currentGeneral
   • Maintain coding and design standards
   • Build and maintain reusable blocks
2. Develop peopleGeneral
   • Mentor newer engineers
   • Run design reviews and knowledge sharing sessions