EUV Source Engineer

Project

Work done for a product or program.

• Optimise tin droplet generation, droplet steering and pre-pulse/main-pulse laser timing to maximise conversion efficiency into in-band 13.5 nm light.
• Characterise EUV plasma emission with flying-circus and in-band energy monitors, spectrometers and fast imaging diagnostics.
• Develop debris mitigation strategies — hydrogen flow, buffer gas, foil traps and tin management — to protect the collector mirror.
• Model source plasma physics and radiation transport with hydrodynamic and kinetic simulation to guide hardware changes.
• Improve collector mirror lifetime and reflectivity retention, and quantify degradation mechanisms in situ.
• Design and run experiments on source test benches and on production sources in customer fabs during scheduled downs.
• Analyse source availability and failure data, and drive design and PM changes that reduce unscheduled downtime.
• Integrate source behaviour with scanner dose control, exposure sequencing and thermal management requirements.
• Manage hydrogen, tin and high-power CO2 laser safety controls in a research and production environment.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Drive source power and dose-stability roadmaps toward higher wafer-per-hour throughput targets on NXE and EXE platforms.

Project

1. Produce and hand over the role's key deliverables
   • Source power, conversion efficiency and dose-stability characterisation reports
   • Debris mitigation and collector lifetime improvement roadmap
   • Plasma and radiation transport simulation models
   • Source availability and failure-mode analysis package
   • Hardware change proposals with experimental validation data
   • Source qualification specification for new platform releases
2. Run research projectsGeneral
   • Define hypotheses and experiments
   • Build test structures or models
   • Analyse and report the results
3. Transfer resultsGeneral
   • Hand findings over to development
   • Support early adoption

Function

1. Stay currentGeneral
   • Review the literature
   • Work with universities and consortia
2. Protect and shareGeneral
   • File invention disclosures
   • Publish where allowed