Lithography Optics Engineer

Project

Work done for a product or program.

• Design and optimise illumination and projection optical trains in Zemax OpticStudio or Code V against resolution, NA, telecentricity and distortion targets.
• Build and manage wavefront error budgets across mirrors and lenses, allocating figure, mid-spatial-frequency roughness and alignment contributions.
• Model aberrations, flare, apodisation and polarisation effects and link them to imaging performance through rigorous lithography simulation.
• Design and run interferometric metrology (Fizeau, phase-shifting, at-wavelength) to qualify optical surfaces and assemblies.
• Define alignment and assembly procedures for optical modules, including thermal, vibration and gravity-sag compensation strategies.
• Analyse thermal-induced lens and mirror deformation under exposure dose and design active correction or compensation schemes.
• Support contamination control strategy for optics, including hydrogen cleaning, carbon growth and oxidation mitigation on EUV mirrors.
• Correlate scanner imaging performance data from the field with optical models to diagnose overlay, CD uniformity and focus issues.
• Collaborate with Zeiss or in-house optics manufacturing on polishing, ion-beam figuring and surface metrology capability limits.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Specify multilayer Mo/Si EUV mirror coatings or fused silica and CaF2 DUV lens materials with the coating and materials suppliers.

Project

1. Produce and hand over the role's key deliverables
   • Optical design prescription and tolerance analysis
   • Wavefront error budget and aberration allocation document
   • Optical module alignment and qualification procedure
   • Interferometric metrology reports for optics acceptance
   • Thermal-optical deformation and correction analysis
   • Imaging performance correlation report versus field data
2. Design the blockGeneral
   • Write or capture the design to the specification
   • Run lint, simulation or circuit checks
   • Close design reviews and their actions
3. Support integration and sign-offGeneral
   • Fix bugs found by verification
   • Support timing and physical closure
   • Deliver handoff files and documentation

Function

1. Keep design methods currentGeneral
   • Maintain coding and design standards
   • Build and maintain reusable blocks
2. Develop peopleGeneral
   • Mentor newer engineers
   • Run design reviews and knowledge sharing sessions