Developing each unit process the node needs, such as patterning, etch, deposition, implant, thermal steps, planarisation and cleans, until each module meets its own capability targets on the chosen equipment and materials.
This stage with its neighbours. Each row is a discipline active here, shaded by how mature its work is by the end of each stage.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.