Chip lifecycle / Equipment lifecycle / Prototype Build & Integration

Prototype Build & Integration

Assembling the first complete tool in-house, integrating hardware and software, testing it against its requirements in the demonstration lab, running first process results on test wafers, and assessing safety and compliance before anything ships.

Where this stage sits

This stage with its neighbours. Each row is a discipline active here, shaded by how mature its work is by the end of each stage.

Stage

^D04 Software, Controls & Factory Automation

^A05 Prototype Build & IntegrationYou are here

^A06 Alpha Tool at a Lead Customer

Business and customers milestones

ECExport classification and licences in place ASAlpha shipment approval BSBeta shipment approval

Tool engineering milestones

SDRSubsystem critical design review CSRControl software and host interface ready PATR2Prototype internal acceptance AXAlpha evaluation complete

Product management and customer roadmap^A

Design

Prototype

Alpha

Systems engineering and architecture^A

Design

Prototype

Alpha

Process and applications^O

Design

Prototype^A

Alpha

Mechanical, vacuum and wafer handling^A

Design

Prototype

Alpha

Electrical, power, RF and controls hardware^A

Design

Prototype

Alpha

Optics, sources and sensing^A

Design

Prototype

Alpha

Equipment software and factory automation^D

Design^D

Prototype

Alpha

System integration and test^A

Design

Prototype

Alpha

Reliability, safety and compliance^A

Design

Prototype

Alpha

Customer programmes and evaluations^A

Design

Prototype

Alpha^A

Tool manufacturing and supply chain^A

Design

Prototype

Alpha

Quality, configuration and change control^A

Design

Prototype

Alpha

Installation, field service and spare parts^D

Prototype

Alpha

Export control and trade compliance^O

Design

Prototype^A

Alpha

Programme management^A

Design

Prototype

Alpha

KeyConceptRequirements and conceptDesignArchitecture and designPrototypePrototype toolAlphaAlpha toolBetaBeta toolProductionProduction toolFaded block: Held, the status shown before it still standsFreeze or sign-off pointMilestone for one item; the rest of the work carries onMilestone gateTRTechnical readiness review (TR): a gate that checks the technology is ready before the next commitment.You are here: Prototype Build & IntegrationAI impactDisruption (red)Augmentation (blue)Opportunity (green)How AI is changing the workWhat the steps mean What the codes mean

Show this chart as a list

Stages

Software, Controls & Factory Automation^D
Prototype Build & Integration (this stage)^A
Alpha Tool at a Lead Customer^A

Business and customers milestones

Tool engineering milestones

Subsystem critical design review (SDR)
Control software and host interface ready (CSR)
Prototype internal acceptance (PA) (technical readiness review TR2)
Alpha evaluation complete (AX)

Disciplines

Product management and customer roadmap^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Business case and pricing approved on the frozen architecture, and the customer roadmap kept current during design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Roadmap and pricing updated from the prototype results.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Beta customers chosen from the alpha results.
Systems engineering and architecture^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Architecture, subsystem specifications and interfaces frozen, and the error budget held through design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Requirements verified on the prototype, with the traceability and the cost of ownership model updated.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Requirements verification continued on the alpha tool at the lead customer.
Process and applications^O
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Process feasibility shown on test hardware for the architecture, and demonstration lab process work started.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Demonstration lab process results final on the prototype, with a first recipe baseline.^A
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Key process requirements shown on wafers at the lead customer.
Mechanical, vacuum and wafer handling^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Platform and chamber concept set and subsystem designs through their critical design review, with prototype parts ordered.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Mechanical modules built and tested on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Design changes from the alpha evaluation recorded.
Electrical, power, RF and controls hardware^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Electrical and control architecture set, schematics and harnesses designed, and interlocks checked with the control software.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Electrical safety tests passed on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Electrical changes from the alpha evaluation recorded.
Optics, sources and sensing^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Optical, source and sensor concept set and designs through their critical design review, with calibration development started.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Calibration method final on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Optics, sources and sensors running at the lead customer with the calibration in use.
Equipment software and factory automation^D
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Software architecture set, and the control software and host interface released for the prototype.^D
- Prototype Build & Integration: maturity Prototype, Prototype tool. Control software integrated on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Control software updated for the alpha tool and host integration started at the lead customer.
System integration and test^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Integration and test plan final at the critical design review, and the prototype build started.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Prototype built and tested, with the build record and test report final.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Alpha tool configuration recorded and evaluation tools built.
Reliability, safety and compliance^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Reliability targets allocated, and the safety concept and hazard analysis built into the design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Safety and compliance assessment final on the prototype, with the SEMI S2 and SEMI S8 evaluation started.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Reliability growth testing on the alpha tool.
Customer programmes and evaluations^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Lead customer engagement kept up through design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Alpha site and evaluation plan prepared with the lead customer.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Alpha programme run and its report agreed with the customer.^A
Tool manufacturing and supply chain^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Make or buy plan, should-cost estimate and critical suppliers set during design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Prototype parts supplied and built into the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Parts supplied for the alpha and beta tools.
Quality, configuration and change control^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Design reviews run and recorded.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Design review actions closed on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Configuration baseline set for the alpha tool.
Installation, field service and spare parts^D
- Prototype Build & Integration: maturity Prototype, Prototype tool. Installation procedures and the site preparation guide drafted on the prototype.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Installation procedures used for the alpha tool at the lead customer.
Export control and trade compliance^O
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Technology control plan drafted and classification work under way on the design.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Export classification and licences in place before anything ships.^A; Classification confirmed
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Alpha shipment and parties screened.
Programme management^A
- Software, Controls & Factory Automation: maturity Design, Architecture and design. Development plan and budget approved, and development coordinated.
- Prototype Build & Integration: maturity Prototype, Prototype tool. Prototype acceptance prepared and risks reviewed.
- Alpha Tool at a Lead Customer: maturity Alpha, Alpha tool. Alpha evaluation coordinated.

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