1. Purpose and scope
The prototype is where every subsystem and the control software meet for the first time. The purpose of this stage is to build one complete tool, make it work as a system, test it against its requirements in the maker's demonstration lab, and show the first process results on test wafers, so that the team knows what the tool can do before a customer sees it.
Two gates close the stage. The prototype internal acceptance checks the engineering evidence: functions, process results, safety and early reliability, with every gap recorded and owned. The export classification and licences gate checks that the tool, its software, its spares and its technical data are classified under the export rules of every country involved, that licences for the evaluation destinations are held or confirmed not needed, and that customers and end uses have been screened. Nothing ships to a customer without both.
Compliance evidence starts to become formal here. The hazard log is updated with test evidence, electrical safety tests are run, and the independent SEMI S2 and SEMI S8 evaluation is started where customers expect one, so that its findings can be fixed before beta tools are built.
12 more sections for registered members.