Used at the end of Tool Install & Qualification, before Tool set qualified, by the programme lead and discipline leads to confirm the stage's criteria, outputs, decisions and compliance evidence are complete.
MustTool acceptance: passed against the purchase specification, or exceptions agreed.
MustSafety sign-off: recorded for every tool.
MustWafer qualification and matching: within the agreed limits.
MustAutomation and data collection: connected and checked.
MustEquipment safety and interface conformance: SEMI S2 evaluation reports reviewed, and equipment communication and load port interfaces tested against the factory's automation specification.
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