Material · Lithography & Materials
Xenon
The heaviest stable noble gas, used in some plasma etch chemistries, ion implantation, and historically in xenon discharge EUV source concepts before tin proved more efficient.
- Also known as
- Xe
- Type
- Material
- Domain
- Lithography & Materials, Specialty gases
Notes
The scarcest of the commercial noble gases, with semiconductor demand competing against space propulsion.
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Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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