Acronym · Lithography & Materials
WPH (Wafers Per Hour)
The throughput rating of a lithography or process tool, measured on a stated exposure recipe and dose. It drives cost per wafer pass directly, since scanner capital cost is amortised over the wafers it exposes.
- Also known as
- Throughput
- Type
- Acronym
- Domain
- Lithography & Materials, Exposure tools
Notes
EUV throughput climbed from under 100 to roughly 200 wafers per hour as source power improved.
Related terms
- Scanner
- Dose
- Source power
- Cost per wafer
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
No other page of the Hub uses this term yet.
Suggest an improvement
Suggest an improvement to this entry
A clearer definition, an example, a correction or a source an editor can check. Editors review every suggestion before the entry changes.
Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary