Acronym · Lithography & Materials
LPP (Laser-Produced Plasma)
The EUV generation method in which a high-power laser strikes molten tin droplets to create a plasma that radiates at 13.5 nm. It is the only approach that reached production-level source power.
- Type
- Acronym
- Domain
- Lithography & Materials, EUV lithography
Notes
A pre-pulse flattens each droplet into a pancake so the main pulse converts it more efficiently.
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