Acronym · Process Technology
SOI (Silicon On Insulator)
A substrate in which a thin device-quality silicon layer sits on a buried oxide over the handle wafer. The oxide cuts junction capacitance and latch-up, at the cost of a more expensive wafer and worse heat removal.
- Also known as
- FD-SOI (fully depleted), RF-SOI
- Type
- Acronym
- Domain
- Process Technology, Substrates and wafers
- Also relevant to
- Lithography & Materials
Notes
Soitec dominates SOI wafer supply, using the Smart Cut layer-transfer process.
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