Term · Fab Ops, Yield & Metrology
Process control monitor
Test structures placed on a wafer, usually in the scribe lines, and measured after processing to check that each lot met its electrical process targets, such as transistor, resistor and contact parameters.
Its data is supplied with wafers as a condition of acceptance.
- Also known as
- PCM structures, Process control monitor structures
- Type
- Term
- Domain
- Fab Ops, Yield & Metrology, Process control
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