Acronym · Fab Ops, Yield & Metrology
POR (Process of Record)
The officially frozen, qualified recipe and flow for a given process step or technology, against which any proposed change must be benchmarked and formally approved before it can run production.
- Also known as
- Process of record, Baseline process
- Type
- Acronym
- Domain
- Fab Ops, Yield & Metrology, Process control
Notes
Deviating from POR without an approved change is one of the most serious procedural violations in a fab.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 3 pages of the Hub. In each group, the pages that mention it most come first.
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