Acronym · Lithography & Materials
MEEF (Mask Error Enhancement Factor)
The ratio of wafer-level critical dimension change to the mask-level error that caused it, scaled by the reduction ratio. Values above one mean the mask amplifies rather than averages its own imperfections.
- Also known as
- MEF
- Type
- Acronym
- Domain
- Lithography & Materials, Lithography physics
Notes
MEEF rises sharply at low k1, which is why mask CD specifications tightened faster than wafer ones.
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