Metric · Lithography & Materials
k1 factor
The process difficulty coefficient in the Rayleigh resolution equation. Physical single-exposure imaging bottoms out near k1 of 0.25; anything printed below that implies multiple patterning or aggressive resolution enhancement.
- Also known as
- k1
- Type
- Metric
- Domain
- Lithography & Materials, Lithography physics
Notes
A low k1 is shorthand for an expensive, fragile process window rather than a better tool.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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