Acronym · Lithography & Materials
LELE (Litho-Etch-Litho-Etch)
A double patterning scheme in which a layer is split into two masks, each printed and etched in turn into the same film. Its resolution is limited by the overlay between the two exposures.
- Also known as
- LE2, Double patterning
- Type
- Acronym
- Domain
- Lithography & Materials, Patterning techniques
Notes
Extends naturally to LELELE triple patterning, with correspondingly worse cost and overlay budgets.
Related terms
- Multiple patterning
- SADP
- Overlay
- Coloring
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