Diffusion and Thermal Process Engineer

Project

Work done for a product or program.

• Develop and release furnace, RTP, spike, flash and laser anneal recipes for oxidation, nitridation, activation and reliability anneals.
• Manage the integrated thermal budget across the flow so dopant diffusion, silicide stability and high-k regrowth stay within device targets.
• Control gate oxide and interfacial layer thickness, uniformity and integrity, including Dit and breakdown characterisation.
• Optimise dopant activation versus diffusion trade-offs with implant, integration and TCAD engineers using millisecond anneal techniques.
• Own furnace tube and boat conditioning, quartzware lifetime, metallic contamination monitoring and preventive maintenance qualification.
• Control temperature calibration, pyrometer and thermocouple accuracy, ramp rate and gas-flow uniformity across the fleet.
• Reduce thermal-module defectivity including slip lines, haze, crystal defects, stacking faults and wafer warpage.
• Qualify new thermal techniques such as laser spike anneal, microwave anneal and low-thermal-budget processes for backside-power or 3D flows.
• Set up SPC on oxide thickness, sheet resistance, temperature profile and particle performance.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Support hydrogen, ammonia and dichlorosilane safety systems and interlock compliance with facilities and EHS.

Project

1. Produce and hand over the role's key deliverables
   • Released thermal process recipes and specifications
   • Thermal budget map for the technology flow
   • Gate oxide and interfacial layer quality characterisation reports
   • Furnace temperature calibration and matching records
   • Quartzware lifetime and contamination control plan
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality