The list of every production and metrology tool the fab needs, by process step and type, with quantities, configurations, capacity assumptions, suppliers and the phase in which each is installed.
Plan Work product in the Fab build and equipment qualification lifecycle
The tool list drives most of the fab's capital cost, the facility design, utilities, procurement and the transfer strategy. An inaccurate or uncontrolled list sizes utilities wrongly, makes long-lead orders late, undersizes bottlenecks and makes the cost estimate unreliable.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.