The specifications for installing each tool type in the fab: footprint, service area, weight and floor loading, every utility connection with flow, pressure and purity, exhaust, drains, power, vibration and environmental needs.
Specification Work product in the Fab build and equipment qualification lifecycle
Facility designers and installers need exact tool needs to size and place connections. Utilities oversized or undersized, connections in the wrong place and tools that cannot start on time or must be modified after installation are the result of missing specifications.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.