The strategy for how process technology will be brought into the new fab: which processes come from which source fabs, whether they are copied exactly or adapted, how much tool commonality is required and how matching and qualification will be approached.
Plan Work product in the Fab build and equipment qualification lifecycle
The transfer approach drives the tool list, the time to qualify and the risk of yield loss at start-up. Tools chosen that differ from the source make matching harder, invite customers to question equivalence and stretch qualification beyond plan.
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