The record that each fab system and area being decommissioned has been decontaminated and verified safe: gas and chemical lines, exhaust ducts, drains, wet benches, tanks and cleanroom surfaces.
Record or register Work product in the Fab build and equipment qualification lifecycle
Residues of toxic, corrosive or flammable materials can stay in systems long after production stops. A verified decontamination record protects dismantling workers, lets tools and materials be sold or recycled safely and allows site remediation and exit to proceed.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.