Records showing that each production tool's host communication and automation interfaces conform to the factory's equipment interface standards, tested against the factory host before the tool is released.
Record or register Work product in the Fab build and equipment qualification lifecycle
A modern fab runs tools under automated control, and a tool that does not talk correctly to the host cannot run unattended or report data. Interface gaps discovered during production break recipes and data collection and push operators into manual workarounds that bypass automation.
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