The plan for proving that every facility system is installed correctly and performs as designed, from component checks through system start-up, performance tests and integrated testing.
Plan Work product in the Fab build and equipment qualification lifecycle
Fab facility systems are complex and interdependent, and failures after tool move-in are costly. A commissioning plan starts systems in the right order, completes the tests and hands over the facility with proof of performance.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.