1. Purpose and scope
A tool in its bay is not yet a working tool. It must be connected to power, exhaust, gases, chemicals, water and vacuum, started up, tested against what was bought, checked for safety, connected to the factory's systems and proven on wafers. This stage takes every tool through those steps and ends when the tools needed for the first full-flow lots are qualified.
Acceptance tests check the tool against its purchase specification; safety sign-off reviews the tool's SEMI S2 evaluation and the installed interlocks; automation tests check host communication and carrier handling against the factory's automation specification, using the SEMI equipment communication standards such as SEMI E5, SEMI E30 and SEMI E37 and the carrier and load port standards such as SEMI E84 and SEMI E87. Wafer qualification then runs the recipes and compares results with reference tools or the source fab.
In scope: hook-up, start-up, acceptance, safety sign-off, automation integration, fault detection set-up, wafer qualification and matching, and equipment state tracking. Out of scope: the full-flow lots and process qualification, which belong to Process Transfer & First Wafers.
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