1. Purpose and scope
The new fab must show that it makes the same wafers as its reference. Where the process is copied, the aim is to reproduce the source fab's results with matched tools, recipes, materials and controls; where it is developed, the fab must prove it meets its targets. This stage transfers the process, runs the first wafers and qualifies the process for customer products.
Reliability qualification follows published methods such as those from JEDEC, including JESD47 and its referenced test methods. Customers are told about the new fab as their agreements require, often through a customer change notice, and many will qualify their own products on it during the ramp.
In scope: the process transfer plan, recipe and specification transfer, MES set-up, short loops, full-flow lots, first wafer results, process control, reliability qualification and the process qualification report. Out of scope: customer product qualification and the ramp, which belong to Yield & Capacity Ramp.
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