Designing, simulating, building and testing the tool's modules and subsystems on test stands: process chambers, sources and optics, vacuum, gas and fluid delivery, wafer handling, power and RF delivery, thermal control and sensors, each against its specification and interface documents.
This stage with its neighbours. Each row is a discipline active here, shaded by how mature its work is by the end of each stage.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.