Material · Process Technology
Work function metal
The metal layer in a high-k gate stack whose effective work function sets the device threshold voltage. Different thicknesses and compositions of titanium nitride and aluminium-containing films give the multiple Vt options in a modern library.
- Also known as
- WFM
- Type
- Material
- Domain
- Process Technology, Device physics
Notes
Fitting several work function metal patterns into a narrow nanosheet gap is one of the hardest steps in GAA integration.
Related terms
Part of the Process Technology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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