Tool · Lithography & Materials
Stepper
A projection tool that exposes one whole field at a time with mask and wafer stationary, then steps the wafer to the next site. Superseded by scanners at leading edge but still standard for i-line work.
- Also known as
- Step-and-repeat system
- Type
- Tool
- Domain
- Lithography & Materials, Exposure tools
Notes
Replaced full-wafer contact and proximity printing in the late 1970s, which is when reduction reticles became normal.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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