Technology · Photonics, MEMS & Sensors
SOI-MEMS (Silicon-On-Insulator MEMS)
A fabrication approach that defines mechanical structures in the single-crystal device layer of an SOI wafer, using the buried oxide as an etch stop and sacrificial release layer.
- Also known as
- SOI micromachining
- Type
- Technology
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
Single-crystal silicon has almost no mechanical hysteresis or fatigue, which is why it suits precision resonators.
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